JPS6355013B2 - - Google Patents

Info

Publication number
JPS6355013B2
JPS6355013B2 JP12720481A JP12720481A JPS6355013B2 JP S6355013 B2 JPS6355013 B2 JP S6355013B2 JP 12720481 A JP12720481 A JP 12720481A JP 12720481 A JP12720481 A JP 12720481A JP S6355013 B2 JPS6355013 B2 JP S6355013B2
Authority
JP
Japan
Prior art keywords
pressure
sensitive element
plate
sensitive elements
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12720481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5828635A (ja
Inventor
Kazutada Azuma
Nobutoshi Gako
Yasukuni Yamane
Chuji Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP12720481A priority Critical patent/JPS5828635A/ja
Publication of JPS5828635A publication Critical patent/JPS5828635A/ja
Publication of JPS6355013B2 publication Critical patent/JPS6355013B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP12720481A 1981-08-12 1981-08-12 圧力センサ Granted JPS5828635A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12720481A JPS5828635A (ja) 1981-08-12 1981-08-12 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12720481A JPS5828635A (ja) 1981-08-12 1981-08-12 圧力センサ

Publications (2)

Publication Number Publication Date
JPS5828635A JPS5828635A (ja) 1983-02-19
JPS6355013B2 true JPS6355013B2 (en]) 1988-11-01

Family

ID=14954286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12720481A Granted JPS5828635A (ja) 1981-08-12 1981-08-12 圧力センサ

Country Status (1)

Country Link
JP (1) JPS5828635A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06743Y2 (ja) * 1988-01-12 1994-01-05 エスエムシー株式会社 流体圧確認センサ
JP4627661B2 (ja) * 2005-01-25 2011-02-09 国立大学法人岐阜大学 カテーテル用圧力センサ
GB2565564B (en) * 2017-08-16 2020-04-08 Peratech Holdco Ltd Detecting force

Also Published As

Publication number Publication date
JPS5828635A (ja) 1983-02-19

Similar Documents

Publication Publication Date Title
CA1078217A (en) Force transducing cantilever beam and pressure transducer incorporating it
US5331857A (en) Pressure transducer
US6205861B1 (en) Transducer having temperature compensation
US4984467A (en) Transducer for pressures and/or vibrations and method for manufacturing thereof
CA1239806A (en) Capacitive sensing cell made of brittle material
US3149488A (en) Strain gauge measuring apparatus
US6655216B1 (en) Load transducer-type metal diaphragm pressure sensor
US6700473B2 (en) Pressure transducer employing on-chip resistor compensation
US4993267A (en) Electronic transducer
US4404539A (en) Semiconductor strain gauge
JP2011516810A (ja) 圧力測定用グロープラグ
US3956927A (en) Strain gauge transducer apparatus
US4918833A (en) Method of assembling an electronic transducer
CA1309878C (en) Dual sided pressure sensor
US4774843A (en) Strain gage
US4488436A (en) Pressure sensor
JPS6355012B2 (en])
JPS6355013B2 (en])
US3864966A (en) Load transducer
JPS6090696A (ja) 圧覚センサ
JPH0447244A (ja) 半導体圧力センサ
JP3534205B2 (ja) ひずみゲージ式変換器における過渡温度特性の補償回路およびその補償方法
JPS6222272B2 (en])
JP3220346B2 (ja) 圧力センサ及びその製造方法
JPS5845533A (ja) 圧力検出器